Thermal-nanoimprint lithography for perylenediimide-based distributed feedback laser fabrication

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Title: Thermal-nanoimprint lithography for perylenediimide-based distributed feedback laser fabrication

In the present work thermal nanoimprint lithography of various commercial thermoplastic resists as matrixes for perylenediimides (PDIs) has been studied. This fabrication method reduced the number of fabrication steps, and therefore, the cost of the obtained distributed feedback (DFB) lasers. The optical properties of these devices are analyzed, aiming to optimize their performance. Thermal-nan...

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ژورنال

عنوان ژورنال: Microelectronic Engineering

سال: 2014

ISSN: 0167-9317

DOI: 10.1016/j.mee.2013.09.012